Piezoelectric Nanosprings
The ZnO structure has alternating planes of tetrahedrally coordinated O2- and Zn2+. Belt-like, quasi-one-dimensional nanostructures have been synthesized for semiconducting oxides of Zn, Sn, In, Cd, and Ga, by simply evaporating the desired commercial metal oxide powders at high temperatures.
"Nanostructures of Zinc Oxide," Materials Today, June 2004, pages 26-33.
Piezoelectric materials are mechanically responsive to external electric fields, and an applied voltage can be used to stretch or compress the spring. Lithography is inherently two-dimensional and not suitable for coiled springs.